A Path to Nanolithography

• 1 December 1996
• journal article
• Published by Springer Nature in MRS Bulletin
• Vol. 21  (12) , 56-62
• https://doi.org/10.1557/s0883769400032127

Abstract

Keywords

• SMALLER
• EVOLUTION
• QUANTUM
• DEVICES
• COMPLEXITY
• PROCESS LARGE
• AMOUNTS OF INFORMATION
• PROCESSING CIRCUIT
• EXCEEDINGLY LARGE