Growth of Lattice Defects in Silicon during Oxidation
- 1 October 1964
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 35 (10) , 3066-3067
- https://doi.org/10.1063/1.1713179
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and SteamJournal of the Electrochemical Society, 1963
- Surface Damage and Copper Precipitation in SiliconPhysica Status Solidi (b), 1963
- Copper Precipitation on Dislocations in SiliconJournal of Applied Physics, 1956