Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma
- 1 May 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (5R) , 1503-1504
- https://doi.org/10.1143/jjap.31.1503
Abstract
Electron energy distribution functions in a low-pressure rf discharge (<1 mTorr) were measured with an electrostatic energy analyzer facing the powered electrode and the bulk plasma. Electrons with high energy were observed in the former case, whereas the distribution of electrons was almost Maxwellian in the latter case.Keywords
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