Mass spectrometric investigation of the thermal decomposition of various organosilicon compounds in SixC1-x(H) chemical vapour deposition
- 1 June 1982
- journal article
- Published by Elsevier in Journal of Analytical and Applied Pyrolysis
- Vol. 4 (1) , 59-72
- https://doi.org/10.1016/0165-2370(82)80027-2
Abstract
No abstract availableKeywords
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