Defects in AS-Grown Silicon and their Evolution During Heat Treatments

• 1 December 1997
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 258-263, 341-346
• https://doi.org/10.4028/www.scientific.net/msf.258-263.341

Abstract

Keywords

• CRYSTAL PULLING
• CZOCHRALSKI SILICON
• GROWN-IN DEFECTS
• SILICON OXIDE PRECIPITATES
• VOID