Preparation of Photosensitive Gel Films and Fine Patterning of Amorphous Al2O3–SiO2 Thin Films
- 1 January 1998
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 33 (1) , 21-30
- https://doi.org/10.1016/s0025-5408(97)00188-8
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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