Effective Electron Mobility Reduced by Remote Charge Scattering in High-κ Gate Stacks

• 15 July 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 1, No) , 4521-4522
• https://doi.org/10.1143/jjap.41.4521

Abstract

Keywords

• MOBILITY
• DIELECTRIC
• COULOMB POTENTIAL
• GATE