On the spatial resolution of two-dimensional doping profiles as measured using secondary ion mass spectrometry tomography
- 1 January 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (1) , 116-124
- https://doi.org/10.1116/1.587167
Abstract
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