The mechanical field effect transistor: A new force sensor

• 1 May 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (3) , 847-849
• https://doi.org/10.1116/1.575853

Abstract

Keywords

• FIELD EFFECT TRANSISTOR
• MECHANICAL FIELD
• FORCE SENSOR
• NEW FORCE