A Mechanism of the Sidewall Process Induced Junction Leakage Current of LDD Structure
- 1 May 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (5) , 1439-1443
- https://doi.org/10.1149/1.2085803
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: