I n s i t u measurement of the composition of molecular-beam epitaxial (Al, Ga)As by Auger electron spectroscopy
- 1 July 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (4) , 1105-1112
- https://doi.org/10.1116/1.584305
Abstract
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