Degradation of spatial resolution in thin-foil x-ray microchemical analysis due to plural scattering of electrons

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Abstract
A computer-based Monte Carlo simulation of incoherent plural scattering of electrons has been developed in order to estimate the broadening of an electron probe as it propagates through a solid. By applying this approach to modeling the spreading of a fine (50 A) probe focused on a thin foil in a scanning transmission electron microscope (STEM), we have estimated the spatial resolution of the compositional analysis obtainable using energy dispersive x-ray spectroscopy (EDS). Specifically, an attempt has been made to determine how the apparent microchemistry of a feature of finer dimensions than the broadened beam differs from the actual composition of the given feature. The apparent Ge concentration profile in the vicinity of a 200 A wide Ge platelet in a 5000 A thick Al foil was measured, using STEM and EDS, and compared with the profile predicted by Monte Carlo calculations. Results are presented and discussed.

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