Microelectromechanical tuneable filters with 0.47nm linewidth and 70 nm tuning range
- 8 January 1998
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 34 (1) , 76-78
- https://doi.org/10.1049/el:19980033
Abstract
Microelectromechanical filters were fabricated by selective oxidation of AlAs layers in a GaAlAs/AlAs Fabry-Perot structure and by removing the GaAs sacrificial layer. The device exhibits a 3 dB linewidth of 0.47 nm, a tuning range of more than 70 nm and < 1 dB insertion loss. The structure exhibits frequency response of 500 KHz at a 3 dB cutoff point.Keywords
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