Adhesion-related failure mechanisms in micromechanical devices

• 1 January 1997
• journal article
• Published by Springer Nature in Tribology Letters
• Vol. 3  (3) , 223-238
• https://doi.org/10.1023/a:1019133222401

Abstract

Keywords

• RELATED FAILURE
• MICROELECTROMECHANICAL
• THEDOMINANT
• STICK
• SUSPENDED
• SUBSTRATES
• UNEXPECTEDLY
• MEMS
• MEMBERS
• MICROMECHANICAL