Abstract
The theory of the scattering of electrons by acoustic modes in piezoelectric semiconductors is generalized so as to properly take account of the anisotropic scattering probability. The Herring-Vogt approximate solution to the Boltzmann equation is used, which is accurate if the resulting relaxation-time tensor components do not differ by more than a factor of two or so. The other main simplifying assumption consists of treating the frequencies and polarizations of the acoustic modes by a simple approximation. The theory is applied to three symmetry classes of known piezoelectric semiconductors: zincblende and wurtzite symmetry (as typified by the III-V and II-VI compounds) and α-quartz symmetry (as typified by selenium and tellurium). The electron mobility anisotropy calculated for CdS (based on the measured electroelastic properties and cyclotron-resonance masses) agrees quite well with the value deduced from experiment.