Application of Thin-Film Micromachining on Glass
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Surface micromachining technology applied to the fabrication of a FET pressure sensorJournal of Micromechanics and Microengineering, 1996
- Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 1988