A simple analysis of the angular dependence of light-ion sputtering
- 1 March 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 2 (1-3) , 578-582
- https://doi.org/10.1016/0168-583x(84)90269-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Computer studies of the energy spectra and reflection coefficients of light ionsRadiation Effects, 1983
- Angular distribution and differential sputtering yields for low-energy light-ion irradiation of polycrystalline nickel and tungstenApplied Physics A, 1980
- Sputtering yields for light ions as a function of angle of incidenceApplied Physics A, 1979
- Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keVThe European Physical Journal A, 1973
- Contributions of backscattered ions to sputtering yields depending on primary ion energyRadiation Effects, 1973