A chemical-mechanical polish for tungsten

• 30 November 1968
• journal article
• Published by Elsevier in Metallography
• Vol. 1  (2) , 249-250
• https://doi.org/10.1016/0026-0800(68)90008-6

Abstract

Keywords

• HYDROGEN PEROXIDE
• TRANSITION METAL
• CHEMICAL MECHANICAL POLISHING