Growth of Silicon Crystals by a Vapor Phase Pyrolytic Deposition Method

• 1 January 1957
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 104  (5) , 317-319
• https://doi.org/10.1149/1.2428568

Abstract

Keywords

• SILICON
• CHEMICAL VAPOUR DEPOSITION
• NUCLEATION
• SURFACE DIFFUSION
• TURBULENCE
• CHEMICAL REACTIONS
• HIGH-TEMPERATURE EFFECTS