Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering
- 1 January 1989
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 6-7, 395-402
- https://doi.org/10.4028/www.scientific.net/ssp.6-7.395
Abstract
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