Energies and intensities of the KLL Auger spectra of SiH4, PH3, HCl, and Ar
- 1 December 1983
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 79 (11) , 5329-5336
- https://doi.org/10.1063/1.445695
Abstract
The KLL Auger electron spectra of gaseous SiH4, PH3, HCl, and Ar have been measured using TiKα x‐ray excitation and, in the case of HCl, by bombardment with 5 keV electrons. The atomic‐like spectra have been decomposed into the line components. The experimental relative energies and intensities of the Auger lines and the group intensities deduced therefrom are compared with the theoretical calculations as well as with previous experimental and theoretical predictions. Calculations in this work are based on the intermediate coupling (IC) scheme with final ionic state configuration interaction (FISCI). Intensity calculations have been made both with radial integrals calculated by McGuire and by Walters and Bhalla. Relative energies were calculated using the theoretical values of Fk and Gk from Mann’s tables. Theoretical binding energies and spin‐orbit splittings were calculated from tables of Huang et al. A comparison shows that through this series the relative positions of Auger components are well predicted by theory, but the relative intensities of 2s−12p−1(1P1) and 2s−2(1S0) components are lower than theoretical values for PH3, HCl, and Ar. The experimental group intensity of I(KL1L23) is lower and of I(KL2,3L2,3) higher than theoretical predictions.Keywords
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