New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
- 1 July 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (7B) , L909-912
- https://doi.org/10.1143/jjap.35.l909
Abstract
A new realization method for three-dimensional photonic crystals in the optical wavelength region is proposed. Microfabrication techniques using wafer-bonding, selective etching, and laser beam deflection pattern observation techniques are successfully combined, and the feasibility of the proposed method is experimentally demonstrated.Keywords
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