Lamb waves pressure sensor using an AlN/Si structure
- 1 January 1993
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Lamb waves pressure sensor using an AlN/Si structurePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1993
- PC software for SAW propagation in anisotropic multilayersIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1990
- A multisensor employing an ultrasonic Lamb-wave oscillatorIEEE Transactions on Electron Devices, 1988
- Miniaturized Bulk and Surface Acoustic Wave Quartz Oscillators Used as SensorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Zero Temperature Coefficient Surface-Acoustic-Wave Devices Using Epitaxial AlN FilmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1982