Deposition and modification of titanium nitride by ion assisted arc deposition

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 1658-1664
• https://doi.org/10.1116/1.579747

Abstract

Keywords

• ION ASSISTED
• ARC DEPOSITION
• ASSISTED ARC
• TITANIUM NITRIDE
• DEPOSITION AND MODIFICATION