Electrostatically actuated micromirror devices in silicon technology
- 20 April 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 74 (1-3) , 216-218
- https://doi.org/10.1016/s0924-4247(98)00321-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micro-optics, a key technology in the race to microsystemsJournal of Micromechanics and Microengineering, 1995
- Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos ProcessPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995