Basic photonic wire components in silicon-on-insulator

Open Access

18 October 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 189-191
https://doi.org/10.1109/group4.2005.1516448

Abstract

We fabricated basic structures for photonic integrated circuits in silicon-on-insulator photonic wires using CMOS technology. We show low-loss bends and waveguide intersections, power splitters, MMI's and Mach-Zehnder interferometers.

Keywords

WIRE
SILICON ON INSULATOR TECHNOLOGY
PHOTONIC INTEGRATED CIRCUITS
CMOS TECHNOLOGY
PROPAGATION LOSSES
INTEGRATED CIRCUIT TECHNOLOGY
CMOS PROCESS
OPTICAL FIBER COUPLERS
LOSS MEASUREMENT
CROSSTALK

This publication has 2 references indexed in Scilit:

Low Loss Intersection of Si Photonic Wire Waveguides
Japanese Journal of Applied Physics, 2004
An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers
IEEE Journal of Quantum Electronics, 2002