The Use of Organo-Substituted Hydrolyzable Silanes on Silicon Devices

• 1 January 1959
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 106  (10) , 871
• https://doi.org/10.1149/1.2427165

Abstract

Keywords

• HYDROLYZABLE SILANES
• SUBSTITUTED HYDROLYZABLE
• ORGANO SUBSTITUTED
• SILICON DEVICES