Studies of dissolution phenomena in microlithography
- 1 February 1987
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 27 (4) , 282-285
- https://doi.org/10.1002/pen.760270408
Abstract
During the dissolution process, polymer in the glassy state is, transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When poly(methyl methacrylate) dissolves in methyl ethyl ketone, the layer is not detectable below a polymer number‐average molecular weight of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.Keywords
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- In-situ measurement of dielectric thickness during etching or developing processesIEEE Transactions on Electron Devices, 1975