A corrugated capacitor cell (CCC) for megabit dynamic MOS memories

• 1 January 1982
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 806-808
• https://doi.org/10.1109/iedm.1982.190421

Abstract

Keywords

• MOS CAPACITORS
• INSULATION
• DRY ETCHING
• CAPACITANCE
• LABORATORIES
• CHARGE CARRIER LIFETIME
• VOLTAGE
• PHYSICS