Transmission Electron Microscopy Investigation of Defects in B-Implanted 6H-SiC

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 413-416
• https://doi.org/10.4028/www.scientific.net/msf.264-268.413

Abstract

Keywords

• BORON IMPLANTATION
• BORON PRECIPITATES
• ELECTRON MICROSCOPY
• ELEMENTAL MAPPING
• PLANAR DEFECTS