Microstructure of magnetron co-sputtered CoCr thin films
- 10 November 1986
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (19) , 1308-1310
- https://doi.org/10.1063/1.97395
Abstract
Magnetic CoCr films deposited on fused quartz substrates were prepared by the dual‐gun magnetron co‐sputtering technique. The cross‐section transmission electron microscopy studies showed the establishment of a textured columnar structure of the hcp CoCr films. Furthermore, the columnar grains were found to nucleate at the surface of the substrates and grow with the c axis parallel to the film‐normal direction. No initial layer of randomly oriented small equiaxed grains was observed.Keywords
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