Structure and Electrical Properties of Titanium Nitride Films

• 1 January 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (1) , 85-96
• https://doi.org/10.1143/jjap.17.85

Abstract

Keywords

• ELECTRICAL PROPERTIES
• STRUCTURE AND ELECTRICAL
• TITANIUM NITRIDE
• NITRIDE FILMS