The effect of the deposition rate on the properties of d.c.-magnetron-sputtered niobium nitride thin films
- 1 September 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 152 (3) , 535-544
- https://doi.org/10.1016/0040-6090(87)90269-0
Abstract
No abstract availableKeywords
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