Site-Selective Deposition and Micropatterning of Zirconia Thin Films on Templates of Self-Assembled Monolayers
- 1 January 2002
- journal article
- Published by Ceramic Society of Japan in Journal of the Ceramic Society of Japan
- Vol. 110 (1281) , 379-385
- https://doi.org/10.2109/jcersj.110.379
Abstract
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