Low‐intrinsic‐stress and good‐adhesion alloy thin films

• 1 January 1976
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 13  (1) , 99-101
• https://doi.org/10.1116/1.568965

Abstract

Keywords

• ALLOY THIN FILMS
• STRESS AND GOOD
• ADHESION ALLOY THIN