A new approach for the thickness monitoring of optical thin films

• 1 April 1972
• journal article
• Published by Elsevier in Vacuum
• Vol. 22  (4) , 151
• https://doi.org/10.1016/0042-207x(72)90311-9

Abstract

Keywords

• MONITORING PLATE
• FILM THICKNESS
• FILMS ACCURATE
• NEW APPROACH
• NEW PHOTOELECTRIC
• PHOTOELECTRIC OPTICAL
• OPTICAL SYSTEM