Growth and morphological studies of (100) textured diamond thin films by microwave plasma-enhanced chemical vapor deposition
- 1 December 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 270 (1-2) , 210-214
- https://doi.org/10.1016/0040-6090(95)06859-7
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Carburization and bias effects on textured (100) diamond thin films by microwave plasma enhanced chemical vapor depositionJournal of Crystal Growth, 1995
- Effect of gas composition on texture of diamond filmsApplied Physics Letters, 1994
- TEM study of the structure and chemistry of a diamond/silicon interfaceJournal of Materials Research, 1994
- Structural characterization of diamond films grown epitaxially on siliconDiamond and Related Materials, 1994
- The growth of (100) orientated diamond filmsDiamond and Related Materials, 1994
- Highly oriented, textured diamond films on silicon via bias-enhanced nucleation and textured growthJournal of Materials Research, 1993
- Chemical vapour deposition and characterization of smooth {100}-faceted diamond filmsDiamond and Related Materials, 1993
- Diamond thin film growth by microwave plasma chemical vapour deposition and investigation by scanning tunnelling/force microscopy and scanning electron microscopyJournal of Materials Science Letters, 1993
- Texture formation of diamond film synthesized in the CHO systemThin Solid Films, 1992
- Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structuresJournal of Materials Research, 1989