Submicron YBa2Cu3O7−δ-Ag-YBa2Cu3O7−δ superconducting proximity junctions

Abstract
Using a deep submicron structuring process for oxide superconducting films, we have fabricated planar YBa2Cu3O7δ‐Ag‐YBa2Cu3O7–δ proximity junctions operating in the liquid nitrogen temperature region. Under microwave radiation Shapiro steps are generated in the current‐voltage characteristic, in accordance with the resistively shunted junction model.