Rapid Determination of Apparent Activation Energies in Chemical Vapor Deposition
- 1 January 1983
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 130 (1) , 157-160
- https://doi.org/10.1149/1.2119645
Abstract
Laser induced chemical vapor deposition is a powerful tool for rapid determination of apparent chemical activation energies. The method is demonstrated for the case of pyrolytic carbon which was deposited from at various gas pressures, and we find apparent activation energies of .Keywords
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