State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
- 30 June 1982
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 333, 2-8
- https://doi.org/10.1117/12.933404
Abstract
The acrylate family of resists have been the most popular choice of positive resists for advanced lithography. Over the last decade, polymethylmethacrylate (PMMA) and derivatives of the general formula continue to show improved performanceKeywords
This publication has 0 references indexed in Scilit: