SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators
- 28 February 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 8-16
- https://doi.org/10.1016/0924-4247(94)00851-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Monolithic silicon accelerometerSensors and Actuators A: Physical, 1990
- A theoretical study of transducer noise in piezoresistive and capacitive silicon pressure sensorsIEEE Transactions on Electron Devices, 1988
- A graphical representation of the piezoresistance coefficients in siliconIEEE Transactions on Electron Devices, 1982