Ultrasonic Phased Array Transducer for Acoustic Imaging in Air

• 1 January 1986
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 559-562
• https://doi.org/10.1109/ultsym.1986.198800

Abstract

Keywords

• PHASED ARRAYS
• ULTRASONIC TRANSDUCER ARRAYS
• ACOUSTIC ARRAYS
• ACOUSTIC TRANSDUCERS
• ULTRASONIC TRANSDUCERS
• ACOUSTIC IMAGING
• SILICON
• ELECTRODES
• ORIFICES
• MICROPHONES