High voltage thin layer devices (RESURF devices)
- 1 January 1979
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 238-241
- https://doi.org/10.1109/iedm.1979.189589
Abstract
The application of a somewhat unusual diode structure opens the possibility to make novel kinds of high voltage devices even with very thin epitaxial or implanted layers. In the new structures crucial changes in the electric field distribution take place at or at least near the surface. The acronym RESURF (REduced SURface Field) was chosen.Keywords
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