Automatic Electron-Beam Deposition Of Multilayer Soft X-Ray Coatings With Laterally Graded D-Spacing

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Abstract
A computer-controlled electron-beam evaporation system is described that allows fully automated production of soft x-ray reflection coatings with laterally graded d-spacings. Thickness control is done by a combination of measurement of the evaporation rate with a quadrupole mass spectrometer and measurement of the soft x-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer-controlled movement of shutters. A result is given for automatic deposition of a multilayer coating. The first results for deposition of a multilayer soft x-ray coating with linearly varying d-spacing are presented.

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