Development of an electret microphone in silicon

• 1 May 1989
• journal article
• Published by Elsevier in Sensors and Actuators
• Vol. 17  (3-4) , 509-512
• https://doi.org/10.1016/0250-6874(89)80038-1

Abstract

Keywords

• SILICON
• THICK
• ELECTRET MICROPHONE
• SIO2 LAYER
• DIAPHRAGM
• BACKPLATE