Synthesis of stoichiometric InSb thin films by a simple molecular-beam technique
- 1 June 1978
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 49 (6) , 3632-3633
- https://doi.org/10.1063/1.325238
Abstract
In‐Sb alloy films, deposited by a two‐source molecular‐beam technique at substrate temperatures from 500 to 700 K in ultrahigh vacuum, have been examined by Auger electron spectroscopy. The compositional analysis shows that incident atoms of In and Sb react promptly to stabilize as the compound InSb. The stoichiometry of the deposits is disturbed when the surface is saturated with the residual free atoms. The stoichiometric InSb films can be deposited under the beam‐intensity condition that JIn<JSb<JIn+n,n (T) =1.6×1029 exp(−2.3×104/T) atoms/cm2 s, where n corresponds to the critical beam intensity for the condensation of antimony.This publication has 4 references indexed in Scilit:
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