Structure and coherence of NbAl multilayer films
- 1 July 1983
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (7) , 3886-3891
- https://doi.org/10.1063/1.332560
Abstract
NbnAlm multilayer films grown on oxidized Si(100) at room temperature by magnetron sputtering have Nb[110] and A[111] texture. The films have ∼1% coherency strains which decrease with increasing modulation wavelength. The composition modulation is approximately a trapezoidal wave with interfacial regions ∼11 Å thick as a result of grain boundary diffusion.This publication has 11 references indexed in Scilit:
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