Evaluation of SOI/SIMOX substrates using photoconductive frequency resolved spectroscopy (PCRFS)
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 207-209
- https://doi.org/10.1016/0168-583x(89)90772-6
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Frequency-resolved spectroscopy and its application to the analysis of recombination in semiconductorsPhilosophical Magazine Part B, 1984