The chemical vapor deposition of TiB2 from diborane
- 1 October 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 72 (3) , 511-516
- https://doi.org/10.1016/0040-6090(80)90540-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Boriding with a thermally unstable gas (diborane)Metallurgical Transactions A, 1979
- The chemical vapor deposition of TiB2 on graphiteJournal of the Less Common Metals, 1979
- Titanium diboride coatings and their interaction with the substratesThin Solid Films, 1978
- Analysis of the Chemical Vapor Deposition of Titanium Diboride: I . Equilibrium Thermodynamic AnalysisJournal of the Electrochemical Society, 1977
- Chemical vapor deposition of titanium diborideJournal of Crystal Growth, 1974