Layout reconstruction of complex silicon chips
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 28 (2) , 138-145
- https://doi.org/10.1109/4.192045
Abstract
No abstract availableKeywords
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- Charge collection scanning electron microscopyJournal of Applied Physics, 1982